Metal Averaging Flow Sensor

Honeywell Zephyr™ MAF Series sensors provide a digital interface for reading airflow over specified full-scale flow and compensated temperature ranges.

The thermally isolated heater and temperature sensing elements help these sensors provide a fast response to air or gas flow. Zephyr sensors are designed to measure mass flow of air and other non-corrosive gases. Standard flow ranges are 10 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 200 SLPM and 300 SLPM, with custom flow ranges available. The sensors are fully calibrated and temperature compensated with an on-board Application Specific Integrated Circuit (ASIC). The HAF Series >10 SLPM is compensated over the calibrated temperature range of 0°C to 50°C [32°F to 122°F]. The state-of-the-art ASIC-based compensation provides digital (I2C) outputs with a response time of 1 ms. These sensors operate on the heat transfer principle to measure mass airflow. They consist of a micro bridge Microelectronic and Microelectromechanical System (MEMS) with temperature-sensitive resistors deposited with thin films of platinum and silicon nitride. The MEMS sensing die is located in a precise and carefully designed airflow channel to provide repeatable response to flow. Zephyr sensors provide the customer with enhanced reliability, high accuracy, repeatable measurements and the ability to customize sensor options to meet many specific application needs. The combination of rugged housings with a stable substrate makes these products extremely robust. They are designed and manufactured according to ISO 9001 standards.

• Fast response time (1 ms) allows the customer’s application
• to respond quickly to a change in airflow, important in
• critical medical (e.g., anaesthesia) and industrial (e.g., fume
• hood) applications
• High stability reduces errors due to thermal effects and
• null shift, providing accurate readings over time and often
• eliminating the need for system calibration after PCB mount
• and periodically over time
• High sensitivity at very low flows provides a fast response
• time at the onset or cessation of flow
• High 12-bit resolution increases the ability to sense small
• airflow changes, allowing customers to more precisely
• control their application
• Wide airflow range: The industry’s broadest airflow range
• measures mass flow with standard flow ranges of 0 to10,
• 0 to 15, 0 to 20, 0 to 50, 0 to 100, 0 to 200 and 0 SLPM to
• 300 SLPM, or custom flow ranges, increasing the options to
• integrate the sensor into the application
• Choice of port styles: Manifold mount, 22 mm OD tapered
• male fitting, and G 3/8 female threaded fitting provide
• flexibility to choose the pneumatic connection that is best
• for the customer’s application
• Linear output provides a more intuitive sensor signal than
• the raw output of basic airflow sensors, which can help
• reduce production costs, design, and implementation time
• Wide supply voltage range (3 Vdc to 10 Vdc) provides a
• flexible regulated power circuit which allows the designer the
• flexibility to choose the supply voltage that works best in the
• system
• ASIC-based I2C digital output simplifies integration
• to microprocessors or microcontrollers, reducing PCB
• complexity and component count
• RoHS-compliant materials Meet Directive 2002/95/EC.