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Air Quality Sensors

Midas® Gas Detector With Pyrolyzer

Midas® Gas Detectors brings new visibility, reliability and ease of use to gas detection in semiconductor processing and industrial manufacturing.

Overview

Midas® Gas Detectors with pyrolyzer brings new visibility, reliability and ease of use to gas detection in semiconductor processing and industrial manufacturing. These Pyrolyzers in combination with Midas® transmitters provide detection of NF3 and various PFC compounds including C4F6, C5F8, CH2F2 and CH3F. Unit includes a bolt-on pyrolyzer module that operates with any Universal Midas® Extractive Transmitter. Units are powered via direct connection to transmitter unit.

Features & Benefits:
  • Detects more than 35 gases error-free
  • Improved visibility and ease of use
  • Easy installation
Certifications:
  • CE marked
  • Meets EN 50270:2006 (Type2) and EN 61000-6-4:2007
  • ETL approved
  • UL 61010-1 Ed:3
  • IEEE 802.3af-2003